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您的位置：網(wǎng)站首頁 > 技術(shù)文章 > 氣載微業(yè)潔凈等級（ISO 14644-1） SO Classification Number | Maxlmum Concentrationlimit(particles/M3of air) | |||||
0.1um | 0.2um | 0.3um | 0.5um | 1um | 5um | |
ISI01 | 10 | 2 |
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ISI02 | 100 | 24 | 10 | 4 |
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ISI03 | 1,000 | 237 | 102 | 35 |
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ISI04 | 10,000 | 2,370 | 1020 | 352 | 83 |
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ISI05 | 100,000 | 237,000 | 10,2000 | 3,520 | 832 | 29 |
ISI06 | 1,000,000 | 237,000 | 102,000 | 35,5200 | 8,320 | 293 |
ISI07 |
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| 352,000 | 83,200 | 2,930 |
ISI08 |
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| 3,520,000 | 832,000 | 29,300 |
ISI09 |
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| 35,200,000 | 8,320,000 | 293,000 |
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